钽酸锂(LiTaO3)晶体是一种优良的多功能材料,具有很高的应用价值。LiTaO3晶体以它的化学性能稳定高(不溶与水),居里点高于600℃,不易出现退极化现象,介电损耗低,探测率优值高的优良特性,成为热释电红外探测器应用材料的最佳选择。经过抛光的LT晶片广泛用于谐振器、滤波器、换能器等电子通讯器件的制造,尤其以它良好的机电耦合、温度系数等综合性能而被用于制造高频声表面波器件,并应用在手机、对讲机、卫星通讯、航空航天等许多高端通讯领域。
Material | Optical Grade (White or Black) | SAW Grade (White or Black) | LiTaO3 wafers (White or Black &Fe doped) |
Curie Temp | 603±2℃ | 1142±0.7℃ |
Cutting Angle | X/Y/Z etc | X/Y/Z/X112Y/Y36/Y42/Y48/etc | X/Y/Z/X112Y/Y36/Y42/Y48/etc |
Diameter/size | 2”/3”/4” LT wafer | 3”/4”/6" LT wafer | 3”/4”/6" LT wafer |
Tol(±) | <0.20 mm
| <0.20 mm ±0.005mm |
Thickness | 0.18 ~ 0.5mm or more
|
Primary Flat
| 16mm/22mm /32mm /42.5mm /57.5mm |
TTV
| <3µm
|
Bow | -30<bow<30
|
Warp | <40µm
|
Orientation Flat
| All available
|
Surface Type
| Single Side Polished(SSP) /Double Sides Polished(DSP)
|
Polished side Ra
| <0.5nm
|
Back Side Criteria
| General is 0.2-0.5µm or as customized |
S/D | 40/20 or 20/10
|
Edge Criteria | R=0.2mm or Bullnose
|
Optical doped
| Zn/MgO etc |
| Fe doped for saw grade LN< wafers |
Transmissivity |
| general:5.9x10-11<s<2.0*10-10 at 25℃ | general:5.9x10-11<s<2.0*10-10 at 25℃ |
Wafer Surface Criteria | Contamination | None
|
Particles ¢>0.3 µm
| <= 30 |
Scratch , Chipping
| None |
Defect | No edge cracks, scratches, saw marks, stains |