| GaN/ Al₂O₃ Substrates (4")
| Item | Un-doped | N-type | High-doped N-type | Size 尺寸 (mm) | Φ100.0±0.5 (4") | Substrate Structure | GaN on Sapphire(0001) | SurfaceFinished
| (Standard: SSP Option: DSP) | Thickness (μm) | 4.5±0.5; 20±2;Customized | Conduction Type
| Un-doped | N-type | High-doped N-type | Resistivity (Ω·cm)(300K) | ≤0.5 | ≤0.05 | ≤0.01 | GaN Thickness Uniformity
| ≤±10% (4") | Dislocation Density (cm-2)
| ≤5×108 | Useable Surface Area | >90% | Package
| Packaged in a class 100 clean room environment. |
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