Type/Dopant
| N-Type/Si | P-Type/Zn | Dopant | As, Sb | Ga | Growth MethodCZ | CZ | Diameter | 2", 3", 4", 6" | Orientation | (100)±0.5° | Thickness (µm) | 175-500um±25um | OF/IF | US EJ | Resistivity (ohm-cm) | 0.005-30 | 0.005-0.4 | Etch Pitch Density (/cm2) | <300 | <300 | TTV [P/P] (µm) | <15 | TTV [P/E] (µm) | <25 | Warp (µm) | <25 | Surface Finished | P/P, P/E, E/E |
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